ASM Epsilon Solutions

Our trusted partner, Helios has been developing innovative solutions for ASM Epitaxy tools, with outstanding performance results

We can credit them with a completely redesigned ASM E2000 reactor gate valve that fixes poor sealing and reduces particles while enabling faster installation and maintenance. They also released redesigned injectors, transfer arms, and among others, a thermocouple sentry system that detects thermocouple wall breach in less than two minutes. All of those updates being focused toward managing cost of ownership concerns.